Esd Failure Analysis Methodology
نویسنده
چکیده
This paper reviews Failure Analysis methods and discusses the merits and pitfalls associated with some of the more common techniques as they relate to ESD. Although advanced methods such as the Focused Ion Beam will be discussed, the importance of more traditional methods such as liquid crystal, emission microscopy, passive voltage contrast and mechanical polishing will be emphasized. Case histories are based on ESD related failure analysis; however, many of the references cover general Failure Analysis methodology.
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Electrostatic Discharge (ESD) and Failure Analysis: Models, Methodologies and Mechanisms for CMOS, Silicon On Insulator and Silicon Germanium Technologies
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